Fuzzy Control and Connected Region Marking Algorithm-Based SEM Nanomanipulation
The interactive nanomanipulation platform is established based on fuzzy control and connected region marking (CRM) algorithm in SEM. The 3D virtual nanomanipulation model is developed to make up the insufficiency of the 2D SEM image information, which provides the operator with depth and real-time v...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Hindawi Limited
2012-01-01
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| Series: | Mathematical Problems in Engineering |
| Online Access: | http://dx.doi.org/10.1155/2012/803912 |