Fabrication and Study of Micro Monolithic Tungsten Ball Tips for Micro/Nano-CMM Probes
Micro ball tips with high precision, small diameter, and high stiffness stems are required to measure microstructures with high aspect ratio. Existing ball tips cannot meet such demands because of their weak qualities. This study used an arc-discharge melting method to fabricate a micro monolithic t...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2018-03-01
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Series: | Micromachines |
Subjects: | |
Online Access: | http://www.mdpi.com/2072-666X/9/3/133 |