Sliding Mode Observer Based Multi-Layer Metal Plates Core Temperature On-Line Estimation for Semiconductor Intelligence Manufacturing

Sliding Mode Observer Based Multi-Layer Metal Plates Core Temperature On-Line Estimation for Semiconductor Intelligence Manufacturing

This paper focuses on the technological development of core temperature estimation algorithm of multi-layer metal plates. It applies new control technology in the field of real time monitoring of semiconductor producing processes. To achieve real time core temperature estimation in semiconductor equ...

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Bibliographic Details
Main Authors: Min-Che Tsai, Chao-Chung Peng
Format: Article
Language:English
Published: IEEE 2020-01-01
Series:IEEE Access
Subjects:
Intelligent manufacturing
metal core temperature estimation
robust sliding mode observer
mismatched uncertainty
linear matrix inequality
Online Access:https://ieeexplore.ieee.org/document/9233428/

Internet

https://ieeexplore.ieee.org/document/9233428/

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