Enhancement of silicon using micro-patterned surfaces of thin films

Enhancement of silicon using micro-patterned surfaces of thin films

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Micro-textured biomaterials might enhance cytocompatibility of silicon-based micro-electro-mechanical system (bio-MEMS) dummies. Photolithography-physical vapour deposition was used to produce diamond-like carbon (DLC) or Ti squares and circles on silicon, and also their inverse replicas; then DLC a...

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Bibliographic Details
Main Authors: E Kaivosoja, S Myllymaa, V-P Kouri, K Myllymaa, R Lappalainen, YT Konttinen
Format: Article
Language:English
Published: AO Research Institute Davos 2010-04-01
Series:European Cells & Materials
Subjects:
biocompatibility
surface modification
micro-patterning
photolithography
osteoblast
Online Access:http://www.ecmjournal.org/journal/papers/vol019/vol019a15.php

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http://www.ecmjournal.org/journal/papers/vol019/vol019a15.php

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