Properties of Erbium Doped Hydrogenated Amorphous Carbon Layers Fabricated by Sputtering and Plasma Assisted Chemical Vapor Deposition

Properties of Erbium Doped Hydrogenated Amorphous Carbon Layers Fabricated by Sputtering and Plasma Assisted Chemical Vapor Deposition

We report about properties of carbon layers doped with Er<sup>3+</sup> ions fabricated by Plasma Assisted Chemical Vapor Deposition (PACVD) and by sputtering on silicon or glass substrates. The structure of the samples was characterized by X-ray diffraction and their composition was dete...

Full description

Bibliographic Details
Main Authors: V. Prajzler, Z. Burian, V. Jeřábek, I. Hüttel, J. Špirková, J. Gurovič, J. Oswald, J. Zavadil, V. Peřina
Format: Article
Language:English
Published: CTU Central Library 2008-01-01
Series:Acta Polytechnica
Subjects:
carbon layers
Erbium
PACVD
sputtering
photoluminescence
Online Access:https://ojs.cvut.cz/ojs/index.php/ap/article/view/943

Internet

https://ojs.cvut.cz/ojs/index.php/ap/article/view/943

Similar Items