High Performance Power Supplies for Plasma Materials Processing

High Performance Power Supplies for Plasma Materials Processing

Integrated circuits, flat panel displays, solar panels, architectural glass, high resolution camera and many other products are landmarks of the 21<sup>st</sup> century. All of these different everyday objects have one thing in common - they are manufactured using plasma processing techn...

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Main Authors: Sebastian Baba, Wojciech Gajewski, Marek Jasinski, Marcin Zelechowski, Marian P. Kazmierkowski
Format: Article
Language:English
Published: IEEE 2021-01-01
Series:IEEE Access
Subjects:
Plasma applications
plasma materials processing
power conversion
power electronics
Online Access:https://ieeexplore.ieee.org/document/9334997/
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spelling doaj-078d45d493194bd39c2d59bd7461200c2021-03-30T15:18:48ZengIEEEIEEE Access2169-35362021-01-019193271934410.1109/ACCESS.2021.30540519334997High Performance Power Supplies for Plasma Materials ProcessingSebastian Baba0https://orcid.org/0000-0001-6602-3043Wojciech Gajewski1Marek Jasinski2https://orcid.org/0000-0003-1634-5997Marcin Zelechowski3https://orcid.org/0000-0002-4416-1303Marian P. Kazmierkowski4https://orcid.org/0000-0002-5536-8406Research and Development Department, TRUMPF Huettinger Sp. z o.o., Zielonka, PolandResearch and Development Department, TRUMPF Huettinger Sp. z o.o., Zielonka, PolandInstitute of Control and Industrial Electronics, Warsaw University of Technology, Warsaw, PolandResearch and Development Department, TRUMPF Huettinger Sp. z o.o., Zielonka, PolandInstitute of Control and Industrial Electronics, Warsaw University of Technology, Warsaw, PolandIntegrated circuits, flat panel displays, solar panels, architectural glass, high resolution camera and many other products are landmarks of the 21<sup>st</sup> century. All of these different everyday objects have one thing in common - they are manufactured using plasma processing techniques. The aim of this paper is to introduce this silent hero of modern industry, to a broader audience. An evaluation is made of common types of power converters within the scope of plasma processing applications, while the key requirements and future challenges for such power supplies are discussed.https://ieeexplore.ieee.org/document/9334997/Plasma applicationsplasma materials processingpower conversionpower electronics
collection DOAJ
language English
format Article
sources DOAJ
author Sebastian Baba
Wojciech Gajewski
Marek Jasinski
Marcin Zelechowski
Marian P. Kazmierkowski
spellingShingle Sebastian Baba
Wojciech Gajewski
Marek Jasinski
Marcin Zelechowski
Marian P. Kazmierkowski
High Performance Power Supplies for Plasma Materials Processing
IEEE Access
Plasma applications
plasma materials processing
power conversion
power electronics
author_facet Sebastian Baba
Wojciech Gajewski
Marek Jasinski
Marcin Zelechowski
Marian P. Kazmierkowski
author_sort Sebastian Baba
title High Performance Power Supplies for Plasma Materials Processing
title_short High Performance Power Supplies for Plasma Materials Processing
title_full High Performance Power Supplies for Plasma Materials Processing
title_fullStr High Performance Power Supplies for Plasma Materials Processing
title_full_unstemmed High Performance Power Supplies for Plasma Materials Processing
title_sort high performance power supplies for plasma materials processing
publisher IEEE
series IEEE Access
issn 2169-3536
publishDate 2021-01-01
description Integrated circuits, flat panel displays, solar panels, architectural glass, high resolution camera and many other products are landmarks of the 21<sup>st</sup> century. All of these different everyday objects have one thing in common - they are manufactured using plasma processing techniques. The aim of this paper is to introduce this silent hero of modern industry, to a broader audience. An evaluation is made of common types of power converters within the scope of plasma processing applications, while the key requirements and future challenges for such power supplies are discussed.
topic Plasma applications
plasma materials processing
power conversion
power electronics
url https://ieeexplore.ieee.org/document/9334997/
work_keys_str_mv AT sebastianbaba highperformancepowersuppliesforplasmamaterialsprocessing
AT wojciechgajewski highperformancepowersuppliesforplasmamaterialsprocessing
AT marekjasinski highperformancepowersuppliesforplasmamaterialsprocessing
AT marcinzelechowski highperformancepowersuppliesforplasmamaterialsprocessing
AT marianpkazmierkowski highperformancepowersuppliesforplasmamaterialsprocessing
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