High Performance Power Supplies for Plasma Materials Processing
Integrated circuits, flat panel displays, solar panels, architectural glass, high resolution camera and many other products are landmarks of the 21<sup>st</sup> century. All of these different everyday objects have one thing in common - they are manufactured using plasma processing techn...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2021-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9334997/ |