High Performance Power Supplies for Plasma Materials Processing

High Performance Power Supplies for Plasma Materials Processing

Integrated circuits, flat panel displays, solar panels, architectural glass, high resolution camera and many other products are landmarks of the 21<sup>st</sup> century. All of these different everyday objects have one thing in common - they are manufactured using plasma processing techn...

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Bibliographic Details
Main Authors: Sebastian Baba, Wojciech Gajewski, Marek Jasinski, Marcin Zelechowski, Marian P. Kazmierkowski
Format: Article
Language:English
Published: IEEE 2021-01-01
Series:IEEE Access
Subjects:
Plasma applications
plasma materials processing
power conversion
power electronics
Online Access:https://ieeexplore.ieee.org/document/9334997/
Description
Summary:Integrated circuits, flat panel displays, solar panels, architectural glass, high resolution camera and many other products are landmarks of the 21<sup>st</sup> century. All of these different everyday objects have one thing in common - they are manufactured using plasma processing techniques. The aim of this paper is to introduce this silent hero of modern industry, to a broader audience. An evaluation is made of common types of power converters within the scope of plasma processing applications, while the key requirements and future challenges for such power supplies are discussed.
ISSN:2169-3536

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