Know your full potential: Quantitative Kelvin probe force microscopy on nanoscale electrical devices

Know your full potential: Quantitative Kelvin probe force microscopy on nanoscale electrical devices

In this study we investigate the influence of the operation method in Kelvin probe force microscopy (KPFM) on the measured potential distribution. KPFM is widely used to map the nanoscale potential distribution in operating devices, e.g., in thin film transistors or on cross sections of functional s...

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Bibliographic Details
Main Authors: Amelie Axt, Ilka M. Hermes, Victor W. Bergmann, Niklas Tausendpfund, Stefan A. L. Weber
Format: Article
Language:English
Published: Beilstein-Institut 2018-06-01
Series:Beilstein Journal of Nanotechnology
Subjects:
AM-KPFM
AM lift mode
AM off resonance
AM second eigenmode
cross section
crosstalk
field effect transistor
FM-KPFM
frequency modulation heterodyne
frequency modulation sideband
quantitative Kelvin probe force microscopy
solar cells
Online Access:https://doi.org/10.3762/bjnano.9.172

Internet

https://doi.org/10.3762/bjnano.9.172

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