Influence of Gas Flow Rate on the Deposition Rate on Stainless Steel 202 Substrates
Solid thin films have been deposited on stainless steel 202 (SS 202) substrates at different flow rates of natural gas using a hot filament thermal chemical vapor deposition (CVD) reactor. In the experiments, the variations of thin film deposition rate with the variation of gas flow rate have been...
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
University of Kragujevac
2012-12-01
|
| Series: | Tribology in Industry |
| Subjects: | |
| Online Access: | http://www.tribology.fink.rs/journals/2012/2012-4/6.pdf |