Electrothermally-Actuated Micromirrors with Bimorph Actuators—Bending-Type and Torsion-Type

Electrothermally-Actuated Micromirrors with Bimorph Actuators—Bending-Type and Torsion-Type

Three different electrothermally-actuated MEMS micromirrors with Cr/Au-Si bimorph actuators are proposed. The devices are fabricated with the SOIMUMPs process developed by MEMSCAP, Inc. (Durham, NC, USA). A silicon-on-insulator MEMS process has been employed for the fabrication of these micromirrors...

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Bibliographic Details
Main Authors: Cheng-Hua Tsai, Chun-Wei Tsai, Hsu-Tang Chang, Shih-Hsiang Liu, Jui-Che Tsai
Format: Article
Language:English
Published: MDPI AG 2015-06-01
Series:Sensors
Subjects:
microelectromechanical devices
electrothermal effects
silicon on insulator
Online Access:http://www.mdpi.com/1424-8220/15/6/14745

Internet

http://www.mdpi.com/1424-8220/15/6/14745

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