Optimization Design Method for the CMOS-type Capacitive Micro-Machined Ultrasonic Transducer
In this study, an integrated modeling technique for characterization and optimization design of the complementary metal-oxide-semiconductor (CMOS) capacitive micro-arrayed ultrasonic transducer (pCMOS-CMUT) is presented. Electromechanical finite element simulations are performed to investigate its o...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2011-12-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/december_2011/P_897.pdf |