Tunable Optical Properties of Amorphous-Like Ga<sub>2</sub>O<sub>3</sub> Thin Films Deposited by Electron-Beam Evaporation with Varying Oxygen Partial Pressures

Tunable Optical Properties of Amorphous-Like Ga<sub>2</sub>O<sub>3</sub> Thin Films Deposited by Electron-Beam Evaporation with Varying Oxygen Partial Pressures

Ga<sub>2</sub>O<sub>3</sub> thin films were fabricated by the electron-beam evaporation technique at a varying oxygen partial pressure from 0 to 2.0 × 10<sup>−2</sup> Pa. The effect of oxygen partial pressure on the crystalline structure and optical properties of...

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Bibliographic Details
Main Authors: Shijie Li, Chen Yang, Jin Zhang, Linpeng Dong, Changlong Cai, Haifeng Liang, Weiguo Liu
Format: Article
Language:English
Published: MDPI AG 2020-09-01
Series:Nanomaterials
Subjects:
Ga<sub>2</sub>O<sub>3</sub> film
electron-beam evaporation
optical properties
Online Access:https://www.mdpi.com/2079-4991/10/9/1760

Internet

https://www.mdpi.com/2079-4991/10/9/1760

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