Concept for a MEMS-type vacuum sensor based on electrical conductivity measurements
The concept of the micro-structured vacuum sensor presented in this article is the measurement of the electrical conductivity of thinned gases in order to develop a small, economical and quite a simple type of vacuum sensor. There are already some approaches for small vacuum sensors. Most of them...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Copernicus Publications
2017-11-01
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| Series: | Journal of Sensors and Sensor Systems |
| Online Access: | https://www.j-sens-sens-syst.net/6/367/2017/jsss-6-367-2017.pdf |