Morphological dependent Indium incorporation in InGaN/GaN multiple quantum wells structure grown on 4° misoriented sapphire substrate
The epitaxial layers of InGaN/GaN MQWs structure were grown on both planar and vicinal sapphire substrates by metal organic chemical vapor deposition. By comparing the epitaxial layers grown on planar substrate, the sample grown on 4° misoriented from c-plane toward <...
Main Authors: | , , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2016-03-01
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Series: | AIP Advances |
Online Access: | http://dx.doi.org/10.1063/1.4944862 |