Optical MEMS

Optical MEMS

Optical microelectromechanical systems (MEMS), microoptoelectromechanical systems (MOEMS), or optical microsystems are devices or systems that interact with light through actuation or sensing at a micro- or millimeter scale. Optical MEMS have had enormous commercial success in projectors, displays,...

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Bibliographic Details
Format: eBook
Language:English
Published: MDPI - Multidisciplinary Digital Publishing Institute 2019
Subjects:
History of engineering and technology
2D Lissajous
3D measurement
achromatic
angle sensor
bio-optical imaging
confocal
Cu/W bimorph
digital micromirror device
digital micromirror device (DMD)
DMD chip
dual-mode liquid-crystal (LC) device
echelle grating
electromagnetic actuator
electrostatic
electrothermal actuation
electrothermal bimorph
field of view (FOV)
flame retardant 4 (FR4)
fluorescence confocal
fringe projection
higher-order modes
Huygens' metalens
infrared
infrared Fabry-Perot (FP) filtering
input shaping
intraoperative microscope
large reflection variations
laser stripe scanning
laser stripe width
LC micro-lenses controlled electrically
MEMS mirror
MEMS scanning micromirror
MEMS scanning mirror
metalens
metasurface
micro-electro-mechanical systems (MEMS)
microscanner
MLSSP
n/a
NIR fluorescence
ocular aberrations
open-loop control
optical coherence tomography
optical switch
parametric resonance
polarization dependent loss (PDL)
programmable spectral filter
quality map
quasistatic actuation
reliability
residual oscillation
resonant MEMS scanner
scanning micromirror
signal-to-noise ratio (SNR)
spectrometer
stray light
tunable fiber laser
two-photon
usable scan range
variable optical attenuator (VOA)
vibration noise
wavefront sensing
wavelength dependent loss (WDL)
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