MEMS/NEMS Sensors: Fabrication and Application

MEMS/NEMS Sensors: Fabrication and Application

Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter change...

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Bibliographic Details
Format:	eBook
Language:	English
Published:	MDPI - Multidisciplinary Digital Publishing Institute 2019
Subjects:	History of engineering and technology 3D simulation acceleration switch accelerometer accelerometer design Accelerometer readout adaptive control AlGaN/GaN circular HFETs analytical model anisotropy back cavity backstepping approach bonding strength deflection position detector dual-mass MEMS gyroscope electrostatic force feedback femtosecond laser floating slug frequency mismatch frequency split frequency tuning GaAs MMIC GaN diaphragm gas sensor glass welding high temperature pressure sensors inertial switch infrared image level-set method low noise low zero-g offset magnetic MEMS MEMS (micro-electro-mechanical system) methane micro fluidic micro-NIR spectrometer microactuator microdroplet microfluidic microgyroscope micropellistor microwave measurement n/a nanoparticle sensor oil detection optical sensor optomechanical sensor photonic crystal cavity photonic crystal nanobeam cavity power consumption pulse inertia force quadrature modulation signal rapid fabrication refractive index sensor resistance parameter resonant frequency scanning grating mirror silicon single crystal silicon single-layer SiO2 spring design squeeze-film damping suspended micro hotplate temperature sensor temperature uniformity tetramethylammonium hydroxide (TMAH) thermoelectric power sensor threshold accuracy tracking performance tunnel magnetoresistive effect vibrating ring gyroscope wet etching wideband
Online Access:	Open Access: DOAB: description of the publication Open Access: DOAB, download the publication

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