MEMS/NEMS Sensors: Fabrication and Application
Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter change...
| Format: | eBook |
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| Language: | English |
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MDPI - Multidisciplinary Digital Publishing Institute
2019
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| Online Access: | Open Access: DOAB: description of the publication Open Access: DOAB, download the publication |