Laser-Based Nano Fabrication and Nano Lithography
The improvement of fabrication resolutions is an eternal challenge for miniaturizing and enhancing the integration degrees of devices. Laser processing is one of the most widely used techniques in manufacturing due to its high flexibility, high speed, and environmental friendliness. The fabrication...
| Format: | eBook |
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| Language: | English |
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MDPI - Multidisciplinary Digital Publishing Institute
2018
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| Subjects: | |
| Online Access: | Open Access: DOAB: description of the publication Open Access: DOAB, download the publication |