Development of CMOS-MEMS/NEMS Devices

Development of CMOS-MEMS/NEMS Devices

Micro and nano-electro-mechanical system (M/NEMS) devices constitute key technological building blocks to enable increased additional functionalities within Integrated Circuits (ICs) in the More-Than-Moore era, as described in the International Technology Roadmap for Semiconductors. The CMOS ICs and...

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Bibliographic Details
Format: eBook
Language:English
Published: MDPI - Multidisciplinary Digital Publishing Institute 2019
Subjects:
History of engineering and technology
application-specific integrated circuit (ASIC)
atomic force microscope
capacitive pressure sensor
chopper instrumentation amplifier
CMOS
CMOS-MEMS
CMOS-NEMS
encapsulation
gas sensor
Hall effect
high-Q capacitive accelerometer
infrared sensor
interface circuit
M3D
magnetic field
magnetotransistor
mass sensors
mechanical relays
MEMS
MEMS characterization
MEMS modelling
MEMS relays
MEMS resonators
MEMS switches
MEMS-ASIC integration
metal oxide (MOX) sensor
micro sensor
micro-electro-mechanical system (MEMS)
micro-electro-mechanical systems (MEMS) sensors
micro/nanoelectromechanical systems (MEMS/NEMS)
microbolometer
microelectromechanical systems
microhotplate
microresonators
n/a
nano resonator
nano-system array
NEM memory switch
NEMS
oscillator
pierce oscillator
programmable sustaining amplifier
real-time temperature compensation loop
resonator
Sigma-Delta
silicon-on-insulator (SOI)
single-crystal silicon (SC-Si)
stent
temperature sensor
thermal detector
uncooled IR-bolometer
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