Effect of Ion Energy on the Microstructure and Properties of Titanium Nitride Thin Films Deposited by High Power Pulsed Magnetron Sputtering

by Donglin Ma, Qiaoyuan Deng, Huaiyuan Liu, Yongxiang Leng
Published 2021-05-01

Ti–Cu Coatings Deposited by a Combination of HiPIMS and DC Magnetron Sputtering: The Role of Vacuum Annealing on Cu Diffusion, Microstructure, and Corrosion Resistance

by Lina Qin, Donglin Ma, Yantao Li, Peipei Jing, Bin Huang, Fengjuan Jing, Dong Xie, Yongxiang Leng, Behnam Akhavan, Nan Huang
Published 2020-11-01