Understanding and Mitigating Stress Memorization Technique of Induced Layout Dependencies for NMOS HKMG Device

by Ying-Fei Wang, Qing-Chun Zhang, Ping Li, Xiao-Jing Su, Li-Song Dong, Rui Chen, Li-Bin Zhang, Tian-Yang Gai, Ya-Juan Su, Ya-Yi Wei, Tian Chun Ye
Published 2021-01-01