Application of Amorphous Zirconium-Yttrium-Aluminum-Magnesium-Oxide Thin Film with a High Relative Dielectric Constant Prepared by Spin-Coating

by Huiyun Yang, Zhihao Liang, Xiao Fu, Zhuohui Xu, Honglong Ning, Xianzhe Liu, Jiajing Lin, Yaru Pan, Rihui Yao, Junbiao Peng
Published 2021-08-01