Multi-Repeated Projection Lithography for High-Precision Linear Scale Based on Average Homogenization Effect

by Dongxu Ren, Huiying Zhao, Chupeng Zhang, Daocheng Yuan, Jianpu Xi, Xueliang Zhu, Xinxing Ban, Longchao Dong, Yawen Gu, Chunye Jiang
Published 2016-04-01