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Weihnacht, V.
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Weihnacht, V.
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High Performance of Liquid-Gated Silicon Nanowire FETs Covered with Ultrathin Layers of Diamond-Like Tetrahedral Amorphous Carbon
by
Boichuk, N.
,
Kutovyi, Y.
,
Pustovyi, D.
,
Vitusevich, S.
,
Weihnacht
,
V
.
,
Zhang, Y.
Published 2023
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Related Subjects
Amorphous carbon
Biosensors
Chemical vapor deposition
Diamond like carbon
Diamonds
Field effect transistors
Field-effect transistor
High quality
Liquid-gated transistor
Low-temperature physical vapor deposition
Lows-temperatures
Nanowire field-effect transistor
Nanowires
Performance
Physical vapor deposition
Physical vapour deposition
Silicon
Silicon nanowire field-effect transistors
Temperature
Transport properties
X ray photoelectron spectroscopy
diamond-like carbon
liquid-gated transistors
low-temperature physical vapor deposition
nanowire field-effect transistors
transport properties
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