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Wee, M.F.M.R
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Wee, M.F.M.R
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Surface modification of electroosmotic silicon microchannel using thermal dry oxidation
by
Hamzah, A.A
,
Latif, R.
,
Majlis, B.Y
,
Wee
,
M.F.M.R
,
Yaakub, T.N.T
,
Yunas, J.
Published 2018
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Related Subjects
Aspect ratio
Channel cross section
Electroosmosis
Electroosmotic flow
Electroosmotic flow;microfluidic
Microchannels
Nano channels
Parallel microchannels
Plasma etching
Plasma etching process
Scanning electron microscopy
Silica
Silicon microchannels
Silicon nanochannel
Silicon oxides
Surface roughness
Surface treatment
Surfacemodification
Thermal oxidation
Thermal oxidation process
Thermooxidation
Transport properties
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