Low Temperature Growth of the Nanotextured Island and Solid 3C-SiC Layers on Si from Hydric Si, Ge and C Compounds

by Lev K. Orlov, Vladimir I. Vdovin, Natalia L. Ivina, Eduard A. Steinman, Yurii N. Drozdov, Michail L. Orlov
Published 2020-06-01