Templated self-assembly of Si-containing block copolymers for nanoscale device fabrication

by Ross, Caroline A., Manners, I., Gwyther, J., Jung, Yeon Sik, Chuang, Vivian Peng-Wei, Son, Jeong Gon, Gotrik, Kevin W., Mickiewicz, R. A., Yang, Joel K. W., Chang, J. B., Berggren, Karl K.
Published 2010