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Thomas Winterstein
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SU-8 Electrothermal Actuators: Optimization of Fabrication and Excitation for Long-Term Use
by
Thomas
Winterstein
,
Matthias Staab
,
Christian Nakic
,
Hans-Jürgen Feige
,
Jürgen Vogel
,
Helmut F. Schlaak
Published 2014-12-01
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