Surface cleaning and pure nitridation of GaSb by in-situ plasma processing

by Takahiro Gotow, Sachie Fujikawa, Hiroki I. Fujishiro, Mutsuo Ogura, Wen Hsin Chang, Tetsuji Yasuda, Tatsuro Maeda
Published 2017-10-01

Initial Processes of Atomic Layer Deposition of Al2O3 on InGaAs: Interface Formation Mechanisms and Impact on Metal-Insulator-Semiconductor Device Performance

by Shinichi Takagi, Mitsuru Takenaka, Noriyuki Taoka, Masahiko Hata, Tetsuji Yasuda, Hisashi Yamada, Noriyuki Miyata, Yuji Urabe, Tatsuro Maeda, Wipakorn Jevasuwan
Published 2012-03-01