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Low-Temperature MoS<sub>2</sub> Film Formation Using Sputtering and H<sub>2</sub>S Annealing

by Jun'ichi Shimizu, Takumi Ohashi, Kentaro Matsuura, Iriya Muneta, Kakushima Kuniyuki, Kazuo Tsutsui, Nobuyuki Ikarashi, Hitoshi Wakabayashi
Published 2019-01-01

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2

$Sputter-Deposited-MoS<sub>2</sub> <inline-formula> <tex-math notation="LaTeX">${n}$ </tex-math></inline-formula>MISFETs With Top-Gate and Al<sub>2</sub>O<sub>3</sub> Passivation Under Low Thermal Budget for Large Area Integration$

Sputter-Deposited-MoS<sub>2</sub> <inline-formula> <tex-math notation="LaTeX">${n}$ </tex-math></inline-formula>MISFETs With Top-Gate and Al<sub>2</sub>O<sub>3</sub> Passivation Un...

by Kentaro Matsuura, Jun'Ichi Shimizu, Mayato Toyama, Takumi Ohashi, Iriya Muneta, Seiya Ishihara, Kuniyuki Kakushima, Kazuo Tsutsui, Atsushi Ogura, Hitoshi Wakabayashi
Published 2018-01-01

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