Microfabrication Process-Driven Design, FEM Analysis and System Modeling of 3-DoF Drive Mode and 2-DoF Sense Mode Thermally Stable Non-Resonant MEMS Gyroscope

by Syed Ali Raza Bukhari, Muhammad Mubasher Saleem, Umar Shahbaz Khan, Amir Hamza, Javaid Iqbal, Rana Iqtidar Shakoor
Published 2020-09-01

A Low-g MEMS Accelerometer with High Sensitivity, Low Nonlinearity and Large Dynamic Range Based on Mode-Localization of 3-DoF Weakly Coupled Resonators

by Muhammad Mubasher Saleem, Shayaan Saghir, Syed Ali Raza Bukhari, Amir Hamza, Rana Iqtidar Shakoor, Shafaat Ahmed Bazaz
Published 2021-03-01