Wafer-level integration of self-aligned high aspect ratio silicon 3D structures using the MACE method with Au, Pd, Pt, Cu, and Ir

by Mathias Franz, Romy Junghans, Paul Schmitt, Adriana Szeghalmi, Stefan E. Schulz
Published 2020-09-01

On the relationship between SiF4 plasma species and sample properties in ultra low-k etching processes

by Micha Haase, Marcel Melzer, Norbert Lang, Ramona Ecke, Sven Zimmermann, Jean-Pierre H. van Helden, Stefan E. Schulz
Published 2020-06-01

P-N Junction-Based Si Biochips with Ring Electrodes for Novel Biosensing Applications

by Mahdi Kiani, Nan Du, Manja Vogel, Johannes Raff, Uwe Hübner, Ilona Skorupa, Danilo Bürger, Stefan E. Schulz, Oliver G. Schmidt, Heidemarie Schmidt
Published 2019-10-01

Laser induced crystallization of Co–Fe–B films

by Maria Almeida, Apoorva Sharma, Patrick Matthes, Nicole Köhler, Sandra Busse, Matthias Müller, Olav Hellwig, Alexander Horn, Dietrich R. T. Zahn, Georgeta Salvan, Stefan E. Schulz
Published 2021-07-01

Disturbing-Free Determination of Yeast Concentration in DI Water and in Glucose Using Impedance Biochips

by Mahdi Kiani, Nan Du, Manja Vogel, Johannes Raff, Uwe Hübner, Ilona Skorupa, Danilo Bürger, Stefan E. Schulz, Oliver G. Schmidt, Daniel Blaschke, Heidemarie Schmidt
Published 2020-01-01