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Souqui, L.
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Souqui, L.
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Chemical vapor deposition of sp2-boron nitride films on Al2O3(0001), (11 2 ¯ 0), (1 1 ¯ 02), and (10 1 ¯ 0) substrates
by
Högberg, H.
,
Pedersen, H.
,
Sharma, S.
,
Souqui
,
L
.
Published 2022
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Related Subjects
Alumina
Aluminum nitride
Aluminum oxide
BN films
Boron nitride
Boron nitride films
Chemical vapor deposition
Chemical vapor deposition process
Chemical vapour deposition
Crystalline films
Diffractograms
Fourier transform infrared spectroscopy
III-V semiconductors
Nitrides
Polytypes
Sapphire
Sapphire substrates
Substrates
Thin films
Thin-films
Triethylborane
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