Machine learning-based virtual metrology on film thickness in amorphous carbon layer deposition process

by Jeong Eun Choi, Sang Jeen Hong
Published 2021-08-01

Surface Analysis of Chamber Coating Materials Exposed to CF₄/O₂ Plasma

by Seung Hyun Park, Kyung Eon Kim, Sang Jeen Hong
Published 2021-01-01

Artificial Immune System for Fault Detection and Classification of Semiconductor Equipment

by Hyoeun Park, Jeong Eun Choi, Dohyun Kim, Sang Jeen Hong
Published 2021-04-01

Surface Analysis of TMCTS-Based SiOC(H) Low-<i>k</i> Dielectrics in Post-Etch Strip of ACL Hardmask

by Min Kyu Park, Wan Soo Song, Min Ho Kim, Sang Jeen Hong
Published 2021-02-01