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    FEM Modeling of the Temperature Influence on the Performance of SAW Sensors Operating at GigaHertz Frequency Range and at High Temperature Up to 500 °C
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    Epitaxial Growth of Sc<sub>0.09</sub>Al<sub>0.91</sub>N and Sc<sub>0.18</sub>Al<sub>0.82</sub>N Thin Films on Sapphire Substrates by Magnetron Sputtering for Surface Acoustic Waves Applications
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