Assessing the Oxidative Degradation of N-Methylpyrrolidone (NMP) in Microelectronic Fabrication Processes by Using a Multiplatform Analytical Approach

by Gavin Lennon, Shannon Willox, Ragini Ramdas, Scott J. Funston, Matthew Klun, Robert Pieh, Stewart Fairlie, Sara Dobbin, Diego F. Cobice
Published 2020-01-01