Integrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology

by Žarko Zobenica, Rob W. van der Heijden, Maurangelo Petruzzella, Francesco Pagliano, Rick Leijssen, Tian Xia, Leonardo Midolo, Michele Cotrufo, YongJin Cho, Frank W. M. van Otten, Ewold Verhagen, Andrea Fiore
Published 2017-12-01