Pulsed-N2 assisted growth of 5-20 nm thick β-W films

by Avyaya J. Narasimham, Avery Green, Richard J. Matyi, Prasanna Khare, Tuan Vo, Alain Diebold, Vincent P. LaBella
Published 2015-11-01

Fabrication of 5-20 nm thick β-W films

by Avyaya J. Narasimham, Manasa Medikonda, Akitomo Matsubayashi, Prasanna Khare, Hyuncher Chong, Richard J. Matyi, Alain Diebold, Vincent P. LaBella
Published 2014-11-01