1 Million-Q Optomechanical Microdisk Resonators with Very Large Scale Integration

by Maxime Hermouet, Louise Banniard, Marc Sansa, Alexandre Fafin, Marc Gely, Sébastien Pauliac, Pierre Brianceau, Jacques-Alexandre Dallery, Pierre Etienne Allain, Eduardo Gil Santos, Ivan Favero, Thomas Alava, Guillaume Jourdan, Sébastien Hentz
Published 2017-08-01