Low Loss CMOS-Compatible PECVD Silicon Nitride Waveguides and Grating Couplers for Blue Light Optogenetic Applications

by Luis Hoffman, Ananth Subramanian, Philippe Helin, Bert Du Bois, Roel Baets, Pol Van Dorpe, Georges Gielen, Robert Puers, Dries Braeken
Published 2016-01-01