Laser slicing: A thin film lift-off method for GaN-on-GaN technology

by Vladislav Voronenkov, Natalia Bochkareva, Ruslan Gorbunov, Andrey Zubrilov, Viktor Kogotkov, Philipp Latyshev, Yuri Lelikov, Andrey Leonidov, Yuri Shreter
Published 2019-06-01