Process development for stabilization of vacuum arc plasma generation from a TiB2 cathode

by Igor Zhirkov, Peter Polcik, Szilard Kolozsvári, Johanna Rosen
Published 2019-01-01

Effect of Ti-Al cathode grain size on plasma generation and thin film synthesis from a direct current vacuum arc plasma source

by Igor Zhirkov, Andrejs Petruhins, Peter Polcik, Szilard Kolozsvári, Johanna Rosen
Published 2019-04-01