Metasurface Fabrication by Cryogenic and Bosch Deep Reactive Ion Etching

by Angela M. Baracu, Christopher A. Dirdal, Andrei M. Avram, Adrian Dinescu, Raluca Muller, Geir Uri Jensen, Paul Conrad Vaagen Thrane, Hallvard Angelskår
Published 2021-04-01

Silicon Metalens Fabrication from Electron Beam to UV-Nanoimprint Lithography

by Angela Mihaela Baracu, Marius Andrei Avram, Carmen Breazu, Mihaela-Cristina Bunea, Marcela Socol, Anca Stanculescu, Elena Matei, Paul Conrad Vaagen Thrane, Christopher Andrew Dirdal, Adrian Dinescu, Oana Rasoga
Published 2021-09-01