Ultra-high aspect ratio functional nanoporous silicon via nucleated catalysts

by Patil, Jatin J., Smith, Brendan Derek, Grossman, Jeffrey C.
Published 2017

Catalyst Self-Assembly for Scalable Patterning of Sub 10 nm Ultrahigh Aspect Ratio Nanopores in Silicon

by Smith, Brendan Derek, Patil, Jatin J, Ferralis, Nicola, Grossman, Jeffrey C.
Published 2017