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Olaf Schulz
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High-temperature MEMS Heater Platforms: Long-term Performance of Metal and Semiconductor Heater Materials
by
Theodor Doll
,
Gerhard Müller
,
Angelika Krenkow
,
Andreas Helwig
,
Olaf
Schulz
,
Jan Spannhake
Published 2006-04-01
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