Saturation profile measurement of atomic layer deposited film by X-ray microanalysis on lateral high-aspect-ratio structure

by Eero Haimi, Oili M.E. Ylivaara, Jihong Yim, Riikka L. Puurunen
Published 2021-09-01

Microelectrode Array With Transparent ALD TiN Electrodes

by Tomi Ryynänen, Anssi Pelkonen, Kestutis Grigoras, Oili M. E. Ylivaara, Tanja Hyvärinen, Jouni Ahopelto, Mika Prunnila, Susanna Narkilahti, Jukka Lekkala
Published 2019-03-01

Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO2 Using Carbon Dioxide

by Zhen Zhu, Perttu Sippola, Oili M. E. Ylivaara, Chiara Modanese, Marisa Di Sabatino, Kenichiro Mizohata, Saoussen Merdes, Harri Lipsanen, Hele Savin
Published 2019-02-01