Impact of parameter variation in fabrication of nanostructure by atomic force microscopy nanolithography.

by Arash Dehzangi, Farhad Larki, Sabar D Hutagalung, Mahmood Goodarz Naseri, Burhanuddin Y Majlis, Manizheh Navasery, Norihan Abdul Hamid, Mimiwaty Mohd Noor
Published 2013-01-01