Author Correction: Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry

by Ufuk Kilic, Alyssa Mock, Derek Sekora, Simeon Gilbert, Shah Valloppilly, Giselle Melendez, Natale Ianno, Marjorie Langell, Eva Schubert, Mathias Schubert
Published 2021-03-01