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Matthias Driess
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Matthias Driess
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Investigating the Trimethylaluminium/Water ALD Process on Mesoporous Silica by In Situ Gravimetric Monitoring
by
Verena E. Strempel
,
Kristian Knemeyer
,
Raoul Naumann d’Alnoncourt
,
Matthias
Driess
,
Frank Rosowski
Published 2018-05-01
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